Sub-Wavelength Holographic Lithography Stepper for Integrated Circuit Production
Call: HORIZON-CL4-2023-TWIN-TRANSITION-01-02 : High-precision OR complex product manufacturing – potentially including the use of photonics
Start Date: 01/01/2024
Duration: 48
Area: Digital, Industry and Space

HoLiSTEP is a Horizon Europe Innovation Project aims to unleash the potential of sub-wavelength Holographic Lithography as a powerful tool enabling disruptive lithography. This will enable production of 3D structures with complex geometries in a single exposure. In the project, an industrial prototype operating a a laser wavelength of 345nm will be built and demonstrated with selected structures.